照明工程学报

2010, v.21(03) 1-7

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管壁厚度和方波电源频率对氯化氪准分子灯效率的影响
Research on The Characteristics of Krypton Chloride Excimer Lamps Driven by Rectangular ECG

庄晓波;朱绍龙;张善端;
Zhuang Xiaobo Zhu Shaolong Zhang Shanduan(Institute for Electric Light Sources,Fudan University,Shanghai 200433)

摘要(Abstract):

本文介绍了基于介质阻挡放电(DBD)的KrCl*准分子灯的光谱、输入功率以及222nm的辐射效率。KrCl*准分子灯为同轴结构,内管内/外径为14/16mm,外管外径为40mm,壁厚分别为1.2,1.5,2.0mm。灯中充有1.5Torr氯气(Cl2)和148.5Torr氪气(Kr),总气压为150Torr。灯用方波电源来驱动。222nm的辐射功率由Keitz公式计算得出,而灯电功率则通过高压探头和电流互感器结合示波器测量得出。结果表明,管壁越薄效率越高,1.2mm壁厚的KrCl*准分子灯在方波电源驱动下的最佳效率为8.1%.在40~70kHz范围内,方波频率对效率的影响不大,70kHz略好。文中还讨论了输入功率、管壁温度和石英管透过率对效率的影响。
The spectrum,input power and 222nm radiation efficiency were measured for coaxial KrCl* excimer lamps based on the dielectric barrier discharge(DBD).The inner tubes of the lamps have inner /outer diameter(ID /OD) 14 /16mm.The OD of outer tubes is 40mm with wall thickness 1.2,1.5 or 2.0mm.The total filling pressure is 150 Torr with chlorine 1.5 Torr and krypton 148.5 Torr.The lamps were driven by rectangular electronic control gear(ECG).The 222nm radiation power is derived from irradiance,according to the Keitz formula.The input electric power is measured with an oscilloscope,combined with a voltage probe and a current probe.The results show small wall thickness is better.The maximum efficiency of 222nm radiation is 8.1% for a KrCl* excimer lamp with wall thickness 1.2mm,driven by a rectangular ECG at frequency 40 kHz.Though the frequency dependence of radiation efficiency is weak in range 40 ~ 70 kHz,70 kHz may be a better choice.The effects of input power,wall temperature and transmittance of the tube are discussed.

关键词(KeyWords): 氯化氪准分子灯;介质阻挡放电;222nm辐射;辐射效率
KrCl* excimer lamps;DBD;222nm radiation;radiation efficiency

Abstract:

Keywords:

基金项目(Foundation):

作者(Authors): 庄晓波;朱绍龙;张善端;
Zhuang Xiaobo Zhu Shaolong Zhang Shanduan(Institute for Electric Light Sources,Fudan University,Shanghai 200433)

DOI: 10.13223/j.cnki.ciej.2010.03.007

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